(AN) High shear viscosity of CMP slurries.pdf

Characterization of the viscosity of different CMP slurries after dilution and filtration coupled with granulometry to determine particle size distribution (FC_RHEO_12)

Characterization of the viscosity of different CMP slurries after dilution and filtration coupled with granulometry to determine particle size distribution (FC_RHEO_12)

File Type: pdf
Categories: Application Note, Electronics, Flow Rheology by Microfluidics, Fluidicam, Fluidicam Rheo, General Chemistry & Polymers
Tags: Electronics, Flow Rheology, Fluidicam, Fluidicam Rheo, General Chemistry & Polymers
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