(AN) The effect of polymer’s Mw on CMP slurries stability.pdf

Monitoring of the effect of polymer molecular weight on chemical mechanical polishing (CMP) slurries stability : Thickness layer after and clarification velocity (TS_STAB_21)

Monitoring of the effect of polymer molecular weight on chemical mechanical polishing (CMP) slurries stability : Thickness layer after and clarification velocity (TS_STAB_21)

File Type: pdf
Categories: Application Note, Electronics, General Chemistry & Polymers, Stability & Shelf Life, Turbiscan, Turbiscan AGS, Turbiscan Classic 2, Turbiscan Lab, Turbiscan Tower, Turbiscan Tri-Lab
Tags: Electronics, General Chemistry & Polymers, Stability & Size, Turbiscan, Turbiscan AGS, Turbiscan Classic, Turbiscan Classic 2, Turbiscan LAB, Turbiscan Tower, Turbiscan Tower New
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